TVB18:004004006065H19872171965Z65MGCA19614ZZ70Z1977GK-3198031982109KHA-75-151985MGCA4800DSWZZZZM193nZZM1961MGCA1967MMicralign10071978GCADSW4800145GCAMM70MGCA198431ASML10n1.22007（）